8/2/2011	11:44:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2011	11:44:46 AM	Recipe started at 11:44 AM
8/2/2011	11:44:46 AM	Helium valve closed
8/2/2011	11:44:46 AM	H2 valve closed
8/2/2011	11:44:46 AM	BCl3 valve closed
8/2/2011	11:44:46 AM	PH3 valve closed
8/2/2011	11:44:46 AM	SiCl4 pre valve closed
8/2/2011	11:44:46 AM	SiCl4 post valve closed
8/2/2011	11:44:46 AM	Main Vac valve closed
8/2/2011	11:44:46 AM	Bypass valve closed
8/2/2011	11:44:46 AM	Bubbler valve closed
8/2/2011	11:44:46 AM	Helium MFC set to  0.000000
8/2/2011	11:44:46 AM	H2 MFC set to  0.000000
8/2/2011	11:44:46 AM	BCl3 MFC set to  0.000000
8/2/2011	11:44:46 AM	PHl3 MFC set to  0.000000
8/2/2011	11:44:46 AM	SiCl4 MFC set to  0.000000
8/2/2011	11:44:46 AM	Bypass solenoid MFC set to  0.000000
8/2/2011	11:44:46 AM	Tube furnace set to 0
8/2/2011	11:44:49 AM	H2 valve closed
8/2/2011	11:44:49 AM	BCl3 valve closed
8/2/2011	11:44:49 AM	PH3 valve closed
8/2/2011	11:44:49 AM	SiCl4 pre valve closed
8/2/2011	11:44:49 AM	SiCl4 post valve closed
8/2/2011	11:44:49 AM	Main Vac valve closed
8/2/2011	11:44:49 AM	Bypass valve closed
8/2/2011	11:44:49 AM	Bubbler valve closed
8/2/2011	11:44:49 AM	Helium valve opened
8/2/2011	11:44:49 AM	Helium MFC set to  500.000000
8/2/2011	11:44:49 AM	H2 MFC set to  0.000000
8/2/2011	11:44:49 AM	BCl3 MFC set to  0.000000
8/2/2011	11:44:49 AM	PHl3 MFC set to  0.000000
8/2/2011	11:44:49 AM	SiCl4 MFC set to  0.000000
8/2/2011	11:44:49 AM	Bypass solenoid MFC set to  0.000000
8/2/2011	11:44:49 AM	Tube furnace set to 0
8/2/2011	11:45:54 AM	Helium valve closed
8/2/2011	11:45:54 AM	H2 valve closed
8/2/2011	11:45:54 AM	BCl3 valve closed
8/2/2011	11:45:54 AM	PH3 valve closed
8/2/2011	11:45:54 AM	SiCl4 pre valve closed
8/2/2011	11:45:54 AM	SiCl4 post valve closed
8/2/2011	11:45:54 AM	Main Vac valve closed
8/2/2011	11:45:54 AM	Bypass valve closed
8/2/2011	11:45:54 AM	Bubbler valve closed
8/2/2011	11:45:54 AM	Helium MFC set to  0.000000
8/2/2011	11:45:54 AM	H2 MFC set to  0.000000
8/2/2011	11:45:54 AM	BCl3 MFC set to  0.000000
8/2/2011	11:45:54 AM	PHl3 MFC set to  0.000000
8/2/2011	11:45:54 AM	SiCl4 MFC set to  0.000000
8/2/2011	11:45:54 AM	Bypass solenoid MFC set to  0.000000
8/2/2011	11:45:54 AM	Tube furnace set to 0
8/2/2011	11:45:55 AM	Run finished at 11:45 AM
8/2/2011	11:45:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2011	11:47:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2011	11:47:32 AM	Recipe started at 11:47 AM
8/2/2011	11:47:32 AM	Helium valve closed
8/2/2011	11:47:32 AM	H2 valve closed
8/2/2011	11:47:32 AM	BCl3 valve closed
8/2/2011	11:47:32 AM	PH3 valve closed
8/2/2011	11:47:32 AM	SiCl4 pre valve closed
8/2/2011	11:47:32 AM	SiCl4 post valve closed
8/2/2011	11:47:32 AM	Main Vac valve closed
8/2/2011	11:47:32 AM	Bubbler valve closed
8/2/2011	11:47:32 AM	Bypass valve opened
8/2/2011	11:47:32 AM	Helium MFC set to  0.000000
8/2/2011	11:47:32 AM	H2 MFC set to  0.000000
8/2/2011	11:47:32 AM	BCl3 MFC set to  0.000000
8/2/2011	11:47:32 AM	PHl3 MFC set to  0.000000
8/2/2011	11:47:32 AM	SiCl4 MFC set to  0.000000
8/2/2011	11:47:32 AM	Bypass solenoid MFC set to  0.000000
8/2/2011	11:47:32 AM	Tube furnace set to 0
8/2/2011	11:48:36 AM	Helium valve closed
8/2/2011	11:48:36 AM	H2 valve closed
8/2/2011	11:48:36 AM	BCl3 valve closed
8/2/2011	11:48:36 AM	PH3 valve closed
8/2/2011	11:48:36 AM	SiCl4 pre valve closed
8/2/2011	11:48:37 AM	SiCl4 post valve closed
8/2/2011	11:48:37 AM	Main Vac valve closed
8/2/2011	11:48:37 AM	Bubbler valve closed
8/2/2011	11:48:37 AM	Bypass valve opened
8/2/2011	11:48:37 AM	Helium MFC set to  0.000000
8/2/2011	11:48:37 AM	H2 MFC set to  0.000000
8/2/2011	11:48:37 AM	BCl3 MFC set to  0.000000
8/2/2011	11:48:37 AM	PHl3 MFC set to  0.000000
8/2/2011	11:48:37 AM	SiCl4 MFC set to  0.000000
8/2/2011	11:48:37 AM	Bypass solenoid MFC set to  0.000000
8/2/2011	11:48:37 AM	Tube furnace set to 0
8/2/2011	11:49:37 AM	Helium valve closed
8/2/2011	11:49:37 AM	H2 valve closed
8/2/2011	11:49:37 AM	BCl3 valve closed
8/2/2011	11:49:37 AM	PH3 valve closed
8/2/2011	11:49:37 AM	SiCl4 pre valve closed
8/2/2011	11:49:37 AM	SiCl4 post valve closed
8/2/2011	11:49:37 AM	Bypass valve closed
8/2/2011	11:49:37 AM	Bubbler valve closed
8/2/2011	11:49:37 AM	Main Vac valve opened
8/2/2011	11:49:37 AM	Helium MFC set to  0.000000
8/2/2011	11:49:37 AM	H2 MFC set to  0.000000
8/2/2011	11:49:37 AM	BCl3 MFC set to  0.000000
8/2/2011	11:49:37 AM	PHl3 MFC set to  0.000000
8/2/2011	11:49:37 AM	SiCl4 MFC set to  0.000000
8/2/2011	11:49:37 AM	Bypass solenoid MFC set to  0.000000
8/2/2011	11:49:37 AM	Tube furnace set to 0
8/2/2011	11:49:38 AM	Run finished at 11:49 AM
8/2/2011	11:49:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2011	11:56:52 AM	Helium MFC set to  20.000000
8/2/2011	11:56:53 AM	Helium valve opened
8/2/2011	11:56:58 AM	Tube furnace set to 100
8/2/2011	11:58:13 AM	Helium valve closed
8/2/2011	11:58:16 AM	Helium MFC set to  0.000000
8/2/2011	12:00:02 PM	Tube furnace set to 0
8/2/2011	12:00:13 PM	Helium MFC set to  20.000000
8/2/2011	12:00:14 PM	Helium valve opened
8/2/2011	12:01:13 PM	Helium valve closed
8/2/2011	12:01:17 PM	Helium MFC set to  0.000000
8/2/2011	12:06:11 PM	Main Vac valve closed
8/2/2011	12:06:24 PM	Main Vac valve opened
8/2/2011	12:07:59 PM	Helium MFC set to  20.000000
8/2/2011	12:08:02 PM	Helium valve opened
8/2/2011	12:08:48 PM	Helium valve closed
8/2/2011	12:10:41 PM	Recipe started at 12:10 PM
8/2/2011	12:10:41 PM	Helium valve closed
8/2/2011	12:10:41 PM	H2 valve closed
8/2/2011	12:10:41 PM	BCl3 valve closed
8/2/2011	12:10:41 PM	PH3 valve closed
8/2/2011	12:10:41 PM	SiCl4 pre valve closed
8/2/2011	12:10:41 PM	SiCl4 post valve closed
8/2/2011	12:10:41 PM	Main Vac valve closed
8/2/2011	12:10:41 PM	Bypass valve closed
8/2/2011	12:10:41 PM	Bubbler valve closed
8/2/2011	12:10:41 PM	Helium MFC set to  0.000000
8/2/2011	12:10:41 PM	H2 MFC set to  0.000000
8/2/2011	12:10:41 PM	BCl3 MFC set to  0.000000
8/2/2011	12:10:41 PM	PHl3 MFC set to  0.000000
8/2/2011	12:10:41 PM	SiCl4 MFC set to  0.000000
8/2/2011	12:10:41 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	12:10:41 PM	Tube furnace set to 0
8/2/2011	12:10:44 PM	Helium valve closed
8/2/2011	12:10:44 PM	BCl3 valve closed
8/2/2011	12:10:44 PM	PH3 valve closed
8/2/2011	12:10:44 PM	SiCl4 pre valve closed
8/2/2011	12:10:44 PM	SiCl4 post valve closed
8/2/2011	12:10:44 PM	Main Vac valve closed
8/2/2011	12:10:44 PM	Bypass valve closed
8/2/2011	12:10:44 PM	Bubbler valve closed
8/2/2011	12:10:44 PM	H2 valve opened
8/2/2011	12:10:44 PM	Helium MFC set to  0.000000
8/2/2011	12:10:44 PM	H2 MFC set to  500.000000
8/2/2011	12:10:44 PM	BCl3 MFC set to  0.000000
8/2/2011	12:10:44 PM	PHl3 MFC set to  0.000000
8/2/2011	12:10:44 PM	SiCl4 MFC set to  0.000000
8/2/2011	12:10:44 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	12:10:44 PM	Tube furnace set to 0
8/2/2011	12:11:49 PM	Helium valve closed
8/2/2011	12:11:49 PM	BCl3 valve closed
8/2/2011	12:11:49 PM	PH3 valve closed
8/2/2011	12:11:49 PM	SiCl4 pre valve closed
8/2/2011	12:11:49 PM	SiCl4 post valve closed
8/2/2011	12:11:49 PM	Main Vac valve closed
8/2/2011	12:11:49 PM	Bypass valve closed
8/2/2011	12:11:49 PM	H2 valve opened
8/2/2011	12:11:49 PM	Bubbler valve opened
8/2/2011	12:11:49 PM	Helium MFC set to  0.000000
8/2/2011	12:11:49 PM	H2 MFC set to  500.000000
8/2/2011	12:11:49 PM	BCl3 MFC set to  0.000000
8/2/2011	12:11:49 PM	PHl3 MFC set to  0.000000
8/2/2011	12:11:49 PM	SiCl4 MFC set to  0.000000
8/2/2011	12:11:49 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	12:11:49 PM	Tube furnace set to 0
8/2/2011	12:11:50 PM	Helium valve closed
8/2/2011	12:11:50 PM	BCl3 valve closed
8/2/2011	12:11:50 PM	PH3 valve closed
8/2/2011	12:11:50 PM	SiCl4 pre valve closed
8/2/2011	12:11:50 PM	SiCl4 post valve closed
8/2/2011	12:11:50 PM	Main Vac valve closed
8/2/2011	12:11:50 PM	Bypass valve closed
8/2/2011	12:11:50 PM	H2 valve opened
8/2/2011	12:11:50 PM	Bubbler valve opened
8/2/2011	12:11:50 PM	Helium MFC set to  0.000000
8/2/2011	12:11:50 PM	H2 MFC set to  500.000000
8/2/2011	12:11:50 PM	BCl3 MFC set to  0.000000
8/2/2011	12:11:50 PM	PHl3 MFC set to  0.000000
8/2/2011	12:11:50 PM	SiCl4 MFC set to  0.000000
8/2/2011	12:11:50 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	12:11:50 PM	Tube furnace set to 1000
8/2/2011	12:31:50 PM	Helium valve closed
8/2/2011	12:31:50 PM	PH3 valve closed
8/2/2011	12:31:50 PM	Main Vac valve closed
8/2/2011	12:31:50 PM	Bypass valve closed
8/2/2011	12:31:50 PM	H2 valve opened
8/2/2011	12:31:50 PM	BCl3 valve opened
8/2/2011	12:31:50 PM	SiCl4 pre valve opened
8/2/2011	12:31:50 PM	SiCl4 post valve opened
8/2/2011	12:31:50 PM	Bubbler valve opened
8/2/2011	12:31:50 PM	Helium MFC set to  0.000000
8/2/2011	12:31:50 PM	H2 MFC set to  500.000000
8/2/2011	12:31:50 PM	BCl3 MFC set to  2.200000
8/2/2011	12:31:50 PM	PHl3 MFC set to  0.000000
8/2/2011	12:31:50 PM	SiCl4 MFC set to  50.000000
8/2/2011	12:31:50 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	12:31:50 PM	Tube furnace set to 1000
8/2/2011	12:32:20 PM	Helium valve closed
8/2/2011	12:32:20 PM	BCl3 valve closed
8/2/2011	12:32:20 PM	PH3 valve closed
8/2/2011	12:32:20 PM	SiCl4 pre valve closed
8/2/2011	12:32:20 PM	SiCl4 post valve closed
8/2/2011	12:32:20 PM	Main Vac valve closed
8/2/2011	12:32:20 PM	Bypass valve closed
8/2/2011	12:32:20 PM	H2 valve opened
8/2/2011	12:32:20 PM	Bubbler valve opened
8/2/2011	12:32:20 PM	Helium MFC set to  0.000000
8/2/2011	12:32:20 PM	H2 MFC set to  400.000000
8/2/2011	12:32:20 PM	BCl3 MFC set to  0.000000
8/2/2011	12:32:20 PM	PHl3 MFC set to  0.000000
8/2/2011	12:32:20 PM	SiCl4 MFC set to  0.000000
8/2/2011	12:32:20 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	12:32:21 PM	Tube furnace set to 1000
8/2/2011	12:52:21 PM	H2 valve closed
8/2/2011	12:52:21 PM	BCl3 valve closed
8/2/2011	12:52:21 PM	PH3 valve closed
8/2/2011	12:52:21 PM	SiCl4 pre valve closed
8/2/2011	12:52:21 PM	SiCl4 post valve closed
8/2/2011	12:52:21 PM	Main Vac valve closed
8/2/2011	12:52:21 PM	Bypass valve closed
8/2/2011	12:52:21 PM	Helium valve opened
8/2/2011	12:52:21 PM	Bubbler valve opened
8/2/2011	12:52:21 PM	Helium MFC set to  400.000000
8/2/2011	12:52:21 PM	H2 MFC set to  0.000000
8/2/2011	12:52:21 PM	BCl3 MFC set to  0.000000
8/2/2011	12:52:21 PM	PHl3 MFC set to  0.000000
8/2/2011	12:52:21 PM	SiCl4 MFC set to  0.000000
8/2/2011	12:52:21 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	12:52:21 PM	Tube furnace set to 0
8/2/2011	1:12:21 PM	Helium valve closed
8/2/2011	1:12:21 PM	H2 valve closed
8/2/2011	1:12:21 PM	BCl3 valve closed
8/2/2011	1:12:21 PM	PH3 valve closed
8/2/2011	1:12:21 PM	SiCl4 pre valve closed
8/2/2011	1:12:21 PM	SiCl4 post valve closed
8/2/2011	1:12:21 PM	Main Vac valve closed
8/2/2011	1:12:21 PM	Bypass valve closed
8/2/2011	1:12:21 PM	Bubbler valve closed
8/2/2011	1:12:21 PM	Helium MFC set to  0.000000
8/2/2011	1:12:21 PM	H2 MFC set to  0.000000
8/2/2011	1:12:21 PM	BCl3 MFC set to  0.000000
8/2/2011	1:12:21 PM	PHl3 MFC set to  0.000000
8/2/2011	1:12:21 PM	SiCl4 MFC set to  0.000000
8/2/2011	1:12:21 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	1:12:21 PM	Tube furnace set to 0
8/2/2011	2:12:21 PM	Run finished at 2:12 PM
8/2/2011	5:15:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2011	5:15:23 PM	Recipe started at 5:15 PM
8/2/2011	5:15:23 PM	Helium valve closed
8/2/2011	5:15:23 PM	H2 valve closed
8/2/2011	5:15:23 PM	BCl3 valve closed
8/2/2011	5:15:23 PM	PH3 valve closed
8/2/2011	5:15:23 PM	SiCl4 pre valve closed
8/2/2011	5:15:23 PM	SiCl4 post valve closed
8/2/2011	5:15:23 PM	Main Vac valve closed
8/2/2011	5:15:23 PM	Bypass valve closed
8/2/2011	5:15:23 PM	Bubbler valve closed
8/2/2011	5:15:23 PM	Helium MFC set to  0.000000
8/2/2011	5:15:23 PM	H2 MFC set to  0.000000
8/2/2011	5:15:23 PM	BCl3 MFC set to  0.000000
8/2/2011	5:15:23 PM	PHl3 MFC set to  0.000000
8/2/2011	5:15:23 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:15:23 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:15:23 PM	Tube furnace set to 0
8/2/2011	5:15:26 PM	H2 valve closed
8/2/2011	5:15:26 PM	BCl3 valve closed
8/2/2011	5:15:26 PM	PH3 valve closed
8/2/2011	5:15:26 PM	SiCl4 pre valve closed
8/2/2011	5:15:26 PM	SiCl4 post valve closed
8/2/2011	5:15:26 PM	Main Vac valve closed
8/2/2011	5:15:26 PM	Bypass valve closed
8/2/2011	5:15:26 PM	Bubbler valve closed
8/2/2011	5:15:26 PM	Helium valve opened
8/2/2011	5:15:26 PM	Helium MFC set to  500.000000
8/2/2011	5:15:26 PM	H2 MFC set to  0.000000
8/2/2011	5:15:26 PM	BCl3 MFC set to  0.000000
8/2/2011	5:15:26 PM	PHl3 MFC set to  0.000000
8/2/2011	5:15:26 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:15:26 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:15:26 PM	Tube furnace set to 0
8/2/2011	5:15:35 PM	Helium valve closed
8/2/2011	5:15:35 PM	H2 valve closed
8/2/2011	5:15:35 PM	BCl3 valve closed
8/2/2011	5:15:35 PM	PH3 valve closed
8/2/2011	5:15:35 PM	SiCl4 pre valve closed
8/2/2011	5:15:35 PM	SiCl4 post valve closed
8/2/2011	5:15:35 PM	Main Vac valve closed
8/2/2011	5:15:35 PM	Bypass valve closed
8/2/2011	5:15:35 PM	Bubbler valve closed
8/2/2011	5:15:35 PM	Helium MFC set to  0.000000
8/2/2011	5:15:35 PM	H2 MFC set to  0.000000
8/2/2011	5:15:35 PM	BCl3 MFC set to  0.000000
8/2/2011	5:15:35 PM	PHl3 MFC set to  0.000000
8/2/2011	5:15:35 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:15:35 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:15:35 PM	Tube furnace set to 0
8/2/2011	5:15:36 PM	Run finished at 5:15 PM
8/2/2011	5:15:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2011	5:22:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2011	5:22:14 PM	Recipe started at 5:22 PM
8/2/2011	5:22:14 PM	Helium valve closed
8/2/2011	5:22:14 PM	H2 valve closed
8/2/2011	5:22:14 PM	BCl3 valve closed
8/2/2011	5:22:14 PM	PH3 valve closed
8/2/2011	5:22:14 PM	SiCl4 pre valve closed
8/2/2011	5:22:14 PM	SiCl4 post valve closed
8/2/2011	5:22:14 PM	Main Vac valve closed
8/2/2011	5:22:14 PM	Bubbler valve closed
8/2/2011	5:22:14 PM	Bypass valve opened
8/2/2011	5:22:14 PM	Helium MFC set to  0.000000
8/2/2011	5:22:14 PM	H2 MFC set to  0.000000
8/2/2011	5:22:14 PM	BCl3 MFC set to  0.000000
8/2/2011	5:22:14 PM	PHl3 MFC set to  0.000000
8/2/2011	5:22:14 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:22:14 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:22:14 PM	Tube furnace set to 0
8/2/2011	5:23:18 PM	Helium valve closed
8/2/2011	5:23:18 PM	H2 valve closed
8/2/2011	5:23:18 PM	BCl3 valve closed
8/2/2011	5:23:18 PM	PH3 valve closed
8/2/2011	5:23:18 PM	SiCl4 pre valve closed
8/2/2011	5:23:18 PM	SiCl4 post valve closed
8/2/2011	5:23:18 PM	Main Vac valve closed
8/2/2011	5:23:18 PM	Bubbler valve closed
8/2/2011	5:23:18 PM	Bypass valve opened
8/2/2011	5:23:18 PM	Helium MFC set to  0.000000
8/2/2011	5:23:18 PM	H2 MFC set to  0.000000
8/2/2011	5:23:18 PM	BCl3 MFC set to  0.000000
8/2/2011	5:23:18 PM	PHl3 MFC set to  0.000000
8/2/2011	5:23:18 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:23:18 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:23:18 PM	Tube furnace set to 0
8/2/2011	5:24:18 PM	Helium valve closed
8/2/2011	5:24:18 PM	H2 valve closed
8/2/2011	5:24:18 PM	BCl3 valve closed
8/2/2011	5:24:18 PM	PH3 valve closed
8/2/2011	5:24:19 PM	SiCl4 pre valve closed
8/2/2011	5:24:19 PM	SiCl4 post valve closed
8/2/2011	5:24:19 PM	Bypass valve closed
8/2/2011	5:24:19 PM	Bubbler valve closed
8/2/2011	5:24:19 PM	Main Vac valve opened
8/2/2011	5:24:19 PM	Helium MFC set to  0.000000
8/2/2011	5:24:19 PM	H2 MFC set to  0.000000
8/2/2011	5:24:19 PM	BCl3 MFC set to  0.000000
8/2/2011	5:24:19 PM	PHl3 MFC set to  0.000000
8/2/2011	5:24:19 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:24:19 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:24:19 PM	Tube furnace set to 0
8/2/2011	5:24:20 PM	Run finished at 5:24 PM
8/2/2011	5:24:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2011	5:31:01 PM	Helium MFC set to  20.000000
8/2/2011	5:31:03 PM	Helium valve opened
8/2/2011	5:31:40 PM	Helium valve closed
8/2/2011	5:32:14 PM	Helium valve opened
8/2/2011	5:32:53 PM	Helium valve closed
8/2/2011	5:33:21 PM	Main Vac valve closed
8/2/2011	5:33:32 PM	Main Vac valve opened
8/2/2011	5:34:05 PM	Main Vac valve closed
8/2/2011	5:34:15 PM	Main Vac valve opened
8/2/2011	5:43:50 PM	Recipe started at 5:43 PM
8/2/2011	5:43:50 PM	Helium valve closed
8/2/2011	5:43:50 PM	H2 valve closed
8/2/2011	5:43:50 PM	BCl3 valve closed
8/2/2011	5:43:50 PM	PH3 valve closed
8/2/2011	5:43:50 PM	SiCl4 pre valve closed
8/2/2011	5:43:50 PM	SiCl4 post valve closed
8/2/2011	5:43:50 PM	Main Vac valve closed
8/2/2011	5:43:50 PM	Bypass valve closed
8/2/2011	5:43:50 PM	Bubbler valve closed
8/2/2011	5:43:50 PM	Helium MFC set to  0.000000
8/2/2011	5:43:50 PM	H2 MFC set to  0.000000
8/2/2011	5:43:50 PM	BCl3 MFC set to  0.000000
8/2/2011	5:43:50 PM	PHl3 MFC set to  0.000000
8/2/2011	5:43:50 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:43:50 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:43:50 PM	Tube furnace set to 0
8/2/2011	5:43:53 PM	Helium valve closed
8/2/2011	5:43:53 PM	BCl3 valve closed
8/2/2011	5:43:53 PM	PH3 valve closed
8/2/2011	5:43:53 PM	SiCl4 pre valve closed
8/2/2011	5:43:53 PM	SiCl4 post valve closed
8/2/2011	5:43:53 PM	Main Vac valve closed
8/2/2011	5:43:53 PM	Bypass valve closed
8/2/2011	5:43:53 PM	Bubbler valve closed
8/2/2011	5:43:53 PM	H2 valve opened
8/2/2011	5:43:53 PM	Helium MFC set to  0.000000
8/2/2011	5:43:53 PM	H2 MFC set to  500.000000
8/2/2011	5:43:53 PM	BCl3 MFC set to  0.000000
8/2/2011	5:43:53 PM	PHl3 MFC set to  0.000000
8/2/2011	5:43:53 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:43:53 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:43:54 PM	Tube furnace set to 0
8/2/2011	5:45:01 PM	Helium valve closed
8/2/2011	5:45:01 PM	BCl3 valve closed
8/2/2011	5:45:01 PM	PH3 valve closed
8/2/2011	5:45:01 PM	SiCl4 pre valve closed
8/2/2011	5:45:01 PM	SiCl4 post valve closed
8/2/2011	5:45:01 PM	Main Vac valve closed
8/2/2011	5:45:01 PM	Bypass valve closed
8/2/2011	5:45:01 PM	H2 valve opened
8/2/2011	5:45:01 PM	Bubbler valve opened
8/2/2011	5:45:01 PM	Helium MFC set to  0.000000
8/2/2011	5:45:01 PM	H2 MFC set to  500.000000
8/2/2011	5:45:01 PM	BCl3 MFC set to  0.000000
8/2/2011	5:45:01 PM	PHl3 MFC set to  0.000000
8/2/2011	5:45:01 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:45:01 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:45:01 PM	Tube furnace set to 0
8/2/2011	5:45:02 PM	Helium valve closed
8/2/2011	5:45:02 PM	BCl3 valve closed
8/2/2011	5:45:02 PM	PH3 valve closed
8/2/2011	5:45:02 PM	SiCl4 pre valve closed
8/2/2011	5:45:02 PM	SiCl4 post valve closed
8/2/2011	5:45:02 PM	Main Vac valve closed
8/2/2011	5:45:02 PM	Bypass valve closed
8/2/2011	5:45:02 PM	H2 valve opened
8/2/2011	5:45:02 PM	Bubbler valve opened
8/2/2011	5:45:02 PM	Helium MFC set to  0.000000
8/2/2011	5:45:02 PM	H2 MFC set to  500.000000
8/2/2011	5:45:02 PM	BCl3 MFC set to  0.000000
8/2/2011	5:45:02 PM	PHl3 MFC set to  0.000000
8/2/2011	5:45:02 PM	SiCl4 MFC set to  0.000000
8/2/2011	5:45:02 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	5:45:02 PM	Tube furnace set to 1000
8/2/2011	6:05:02 PM	Helium valve closed
8/2/2011	6:05:02 PM	PH3 valve closed
8/2/2011	6:05:02 PM	Main Vac valve closed
8/2/2011	6:05:02 PM	Bypass valve closed
8/2/2011	6:05:02 PM	H2 valve opened
8/2/2011	6:05:02 PM	BCl3 valve opened
8/2/2011	6:05:02 PM	SiCl4 pre valve opened
8/2/2011	6:05:02 PM	SiCl4 post valve opened
8/2/2011	6:05:02 PM	Bubbler valve opened
8/2/2011	6:05:02 PM	Helium MFC set to  0.000000
8/2/2011	6:05:02 PM	H2 MFC set to  500.000000
8/2/2011	6:05:02 PM	BCl3 MFC set to  2.200000
8/2/2011	6:05:02 PM	PHl3 MFC set to  0.000000
8/2/2011	6:05:02 PM	SiCl4 MFC set to  50.000000
8/2/2011	6:05:02 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	6:05:02 PM	Tube furnace set to 1000
8/2/2011	6:20:02 PM	Helium valve closed
8/2/2011	6:20:02 PM	BCl3 valve closed
8/2/2011	6:20:02 PM	PH3 valve closed
8/2/2011	6:20:02 PM	SiCl4 pre valve closed
8/2/2011	6:20:02 PM	SiCl4 post valve closed
8/2/2011	6:20:02 PM	Main Vac valve closed
8/2/2011	6:20:02 PM	Bypass valve closed
8/2/2011	6:20:02 PM	H2 valve opened
8/2/2011	6:20:02 PM	Bubbler valve opened
8/2/2011	6:20:02 PM	Helium MFC set to  0.000000
8/2/2011	6:20:02 PM	H2 MFC set to  500.000000
8/2/2011	6:20:02 PM	BCl3 MFC set to  0.000000
8/2/2011	6:20:02 PM	PHl3 MFC set to  0.000000
8/2/2011	6:20:02 PM	SiCl4 MFC set to  0.000000
8/2/2011	6:20:02 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	6:20:02 PM	Tube furnace set to 750
8/2/2011	6:25:02 PM	H2 valve closed
8/2/2011	6:25:02 PM	BCl3 valve closed
8/2/2011	6:25:02 PM	PH3 valve closed
8/2/2011	6:25:02 PM	SiCl4 pre valve closed
8/2/2011	6:25:02 PM	SiCl4 post valve closed
8/2/2011	6:25:02 PM	Main Vac valve closed
8/2/2011	6:25:02 PM	Bypass valve closed
8/2/2011	6:25:02 PM	Helium valve opened
8/2/2011	6:25:02 PM	Bubbler valve opened
8/2/2011	6:25:02 PM	Helium MFC set to  400.000000
8/2/2011	6:25:02 PM	H2 MFC set to  0.000000
8/2/2011	6:25:02 PM	BCl3 MFC set to  0.000000
8/2/2011	6:25:02 PM	PHl3 MFC set to  0.000000
8/2/2011	6:25:02 PM	SiCl4 MFC set to  0.000000
8/2/2011	6:25:02 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	6:25:02 PM	Tube furnace set to 0
8/2/2011	6:45:02 PM	Helium valve closed
8/2/2011	6:45:02 PM	H2 valve closed
8/2/2011	6:45:02 PM	BCl3 valve closed
8/2/2011	6:45:02 PM	PH3 valve closed
8/2/2011	6:45:02 PM	SiCl4 pre valve closed
8/2/2011	6:45:02 PM	SiCl4 post valve closed
8/2/2011	6:45:02 PM	Main Vac valve closed
8/2/2011	6:45:02 PM	Bypass valve closed
8/2/2011	6:45:02 PM	Bubbler valve closed
8/2/2011	6:45:02 PM	Helium MFC set to  0.000000
8/2/2011	6:45:02 PM	H2 MFC set to  0.000000
8/2/2011	6:45:02 PM	BCl3 MFC set to  0.000000
8/2/2011	6:45:02 PM	PHl3 MFC set to  0.000000
8/2/2011	6:45:02 PM	SiCl4 MFC set to  0.000000
8/2/2011	6:45:02 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	6:45:03 PM	Tube furnace set to 0
8/2/2011	6:45:04 PM	Run finished at 6:45 PM
8/2/2011	10:20:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2011	10:21:00 PM	Recipe started at 10:20 PM
8/2/2011	10:21:00 PM	Helium valve closed
8/2/2011	10:21:00 PM	H2 valve closed
8/2/2011	10:21:00 PM	BCl3 valve closed
8/2/2011	10:21:00 PM	PH3 valve closed
8/2/2011	10:21:00 PM	SiCl4 pre valve closed
8/2/2011	10:21:00 PM	SiCl4 post valve closed
8/2/2011	10:21:00 PM	Main Vac valve closed
8/2/2011	10:21:00 PM	Bypass valve closed
8/2/2011	10:21:00 PM	Bubbler valve closed
8/2/2011	10:21:00 PM	Helium MFC set to  0.000000
8/2/2011	10:21:00 PM	H2 MFC set to  0.000000
8/2/2011	10:21:00 PM	BCl3 MFC set to  0.000000
8/2/2011	10:21:00 PM	PHl3 MFC set to  0.000000
8/2/2011	10:21:00 PM	SiCl4 MFC set to  0.000000
8/2/2011	10:21:00 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	10:21:00 PM	Tube furnace set to 0
8/2/2011	10:21:03 PM	H2 valve closed
8/2/2011	10:21:03 PM	BCl3 valve closed
8/2/2011	10:21:03 PM	PH3 valve closed
8/2/2011	10:21:03 PM	SiCl4 pre valve closed
8/2/2011	10:21:03 PM	SiCl4 post valve closed
8/2/2011	10:21:03 PM	Main Vac valve closed
8/2/2011	10:21:03 PM	Bypass valve closed
8/2/2011	10:21:03 PM	Bubbler valve closed
8/2/2011	10:21:03 PM	Helium valve opened
8/2/2011	10:21:03 PM	Helium MFC set to  500.000000
8/2/2011	10:21:03 PM	H2 MFC set to  0.000000
8/2/2011	10:21:03 PM	BCl3 MFC set to  0.000000
8/2/2011	10:21:03 PM	PHl3 MFC set to  0.000000
8/2/2011	10:21:03 PM	SiCl4 MFC set to  0.000000
8/2/2011	10:21:03 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	10:21:03 PM	Tube furnace set to 0
8/2/2011	10:21:11 PM	Helium valve closed
8/2/2011	10:21:11 PM	H2 valve closed
8/2/2011	10:21:11 PM	BCl3 valve closed
8/2/2011	10:21:11 PM	PH3 valve closed
8/2/2011	10:21:11 PM	SiCl4 pre valve closed
8/2/2011	10:21:11 PM	SiCl4 post valve closed
8/2/2011	10:21:11 PM	Main Vac valve closed
8/2/2011	10:21:11 PM	Bypass valve closed
8/2/2011	10:21:11 PM	Bubbler valve closed
8/2/2011	10:21:11 PM	Helium MFC set to  0.000000
8/2/2011	10:21:11 PM	H2 MFC set to  0.000000
8/2/2011	10:21:11 PM	BCl3 MFC set to  0.000000
8/2/2011	10:21:11 PM	PHl3 MFC set to  0.000000
8/2/2011	10:21:11 PM	SiCl4 MFC set to  0.000000
8/2/2011	10:21:11 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	10:21:11 PM	Tube furnace set to 0
8/2/2011	10:21:12 PM	Run finished at 10:21 PM
8/2/2011	10:21:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2011	10:22:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2011	10:22:39 PM	Recipe started at 10:22 PM
8/2/2011	10:22:39 PM	Helium valve closed
8/2/2011	10:22:39 PM	H2 valve closed
8/2/2011	10:22:39 PM	BCl3 valve closed
8/2/2011	10:22:39 PM	PH3 valve closed
8/2/2011	10:22:39 PM	SiCl4 pre valve closed
8/2/2011	10:22:39 PM	SiCl4 post valve closed
8/2/2011	10:22:39 PM	Main Vac valve closed
8/2/2011	10:22:39 PM	Bubbler valve closed
8/2/2011	10:22:39 PM	Bypass valve opened
8/2/2011	10:22:39 PM	Helium MFC set to  0.000000
8/2/2011	10:22:39 PM	H2 MFC set to  0.000000
8/2/2011	10:22:39 PM	BCl3 MFC set to  0.000000
8/2/2011	10:22:39 PM	PHl3 MFC set to  0.000000
8/2/2011	10:22:39 PM	SiCl4 MFC set to  0.000000
8/2/2011	10:22:39 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	10:22:39 PM	Tube furnace set to 0
8/2/2011	10:23:41 PM	Helium valve closed
8/2/2011	10:23:41 PM	H2 valve closed
8/2/2011	10:23:41 PM	BCl3 valve closed
8/2/2011	10:23:41 PM	PH3 valve closed
8/2/2011	10:23:41 PM	SiCl4 pre valve closed
8/2/2011	10:23:41 PM	SiCl4 post valve closed
8/2/2011	10:23:41 PM	Main Vac valve closed
8/2/2011	10:23:41 PM	Bubbler valve closed
8/2/2011	10:23:41 PM	Bypass valve opened
8/2/2011	10:23:41 PM	Helium MFC set to  0.000000
8/2/2011	10:23:41 PM	H2 MFC set to  0.000000
8/2/2011	10:23:41 PM	BCl3 MFC set to  0.000000
8/2/2011	10:23:41 PM	PHl3 MFC set to  0.000000
8/2/2011	10:23:41 PM	SiCl4 MFC set to  0.000000
8/2/2011	10:23:41 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	10:23:41 PM	Tube furnace set to 0
8/2/2011	10:24:41 PM	Helium valve closed
8/2/2011	10:24:41 PM	H2 valve closed
8/2/2011	10:24:41 PM	BCl3 valve closed
8/2/2011	10:24:41 PM	PH3 valve closed
8/2/2011	10:24:41 PM	SiCl4 pre valve closed
8/2/2011	10:24:41 PM	SiCl4 post valve closed
8/2/2011	10:24:41 PM	Bypass valve closed
8/2/2011	10:24:41 PM	Bubbler valve closed
8/2/2011	10:24:41 PM	Main Vac valve opened
8/2/2011	10:24:41 PM	Helium MFC set to  0.000000
8/2/2011	10:24:41 PM	H2 MFC set to  0.000000
8/2/2011	10:24:41 PM	BCl3 MFC set to  0.000000
8/2/2011	10:24:41 PM	PHl3 MFC set to  0.000000
8/2/2011	10:24:41 PM	SiCl4 MFC set to  0.000000
8/2/2011	10:24:41 PM	Bypass solenoid MFC set to  0.000000
8/2/2011	10:24:41 PM	Tube furnace set to 0
8/2/2011	10:24:42 PM	Run finished at 10:24 PM
8/2/2011	10:24:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
